Researchers Develop Si-based Super-high Frequency Nanoelectromechanical Resonator
Recently, a group led by Prof. GUO Guoping from the University of Science and Technology of China, collaborating with Prof. ZHANG Zhen's group from Uppsala University, Sweden, designed and fabricated CMOS-compatible suspended SHT devices which worked as super-high frequency nanoelectromechanical resonators.
Nov 24, 2020